TY  - BOOK
AU  - GHANDHI, SORAB K.
TI  - VLSI FABRICATION PRINCIPLES
SN  - 9814126942
U1  - 621.395/GHA 
PY  - 2003///
CY  - NEW YORK.
PB  - JOHN WILEY & SONS INC., NEW YORK.
ER  -